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In this paper microelectromechanical system MEMS has been utilized to make miniaturized ion optics required for making the portable all-in-one mass spectrometer Four different ion optics components were fabricated using deep-reactive ion etching DRIE of n-doped silicon-on-insulator These components are 1 mm Bradbury-Nielsen gate 500 m coaxial ring ion trap CRITter reflectron optics and 500 m Einzel lens The Bradbury-Nielsen gate was made using a pattern of alternating electrode wires which either allows ions to pass or stop through the gate The CRITter was made using five trapping rings and two end caps to make mass selection ion optics and it was also used in testing the alignment capability of fabrication process The reflectron optics was made using a assembly of fifteen rectangular elements arranged in series The fourth ion optics component was assembled MEMS Einzel lens which consisted of three lenses It was used to focus the ions beam to increase the ion current and detectability All the components were tested using ion produced with 70 eV EI ionization These assemblies were characterized in terms of breakdown voltage durability and alignment For current devices the breakdown voltage was reported 750 V The CRITter was tested with 1 toluene at pressure of 1 x 10-4 Torr The resolution was limited due to the alignment errors and also aberration in etched designs got more impactful as the size of the ion trap was reduced Current reflectron optics was not capable of resolving the peaks of toluene Therefore in the future analyzer path length will be increased by using multiple reflectrons These miniaturized components were assembled using an encoded piezo-manipulator with pick and place capability Resolution and ion attenuation was found to be the greatest concern of the current design at presentFox J Saini R Tsui K Verbeck G Microelectromechanical system assembled ion optics An advance to miniaturization and assembly of electron and ion optics Review of Scientific Instruments 2009 80 9 093302 In this paper a
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